TECHNOLOG AND SERVICE
Epitaxial equipment
Single wafer reactor capability
• Outstanding uniformity in thickness and resistivity
• Unmatched process capability
• Thin Epi capability
• 8' Epi capabilit
Single wafer reactor capability
• Good uniformity of thickness and resistivity.
• Excellent control of slip line.
• Production capacity of thick film epitaxial wafers
• 8' Epi capabilit
Single wafer reactor capability
多片硅外延炉
